Direct Fabrication of Metal Patterns on Resin Substrate by Combining Imprint and Electrochemical Lithography

Authors :: Hiroshi Yanagimoto
Yusuke Kimura
Takaaki Tsuruoka
Ryosuke Fuziwara
Kensuke Akamatsu
Yohei Takashima
Hidemi Nawafune
Source :: Journal of the Surface Finishing Society of Japan. 66:18-19
Publication Year :: 2015
Publisher :: The Surface Finishing Society of Japan, 2015.

Subjects :: Fabrication
Materials science
General Engineering
Nanotechnology
Substrate (printing)
Electrochemistry
law.invention
Metal
law
visual_art
visual_art.visual_art_medium
X-ray lithography
Photolithography
Lithography
Next-generation lithography

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