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Detection and evaluation of surface defect for large-size grating

Authors :
Xingxue Li
Bin Zhou
Mengqing Xu
YuDa Chen
Yihan Wang
Jin Wang
Changhe Zhou
Source :
Holography, Diffractive Optics, and Applications XII.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Holography, Diffractive Optics, and Applications XII
Accession number :
edsair.doi...........7856946e89ad27e1a2db9ff1282c9f92

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