Reticle inspection using an image filter method

MLA

Masahiko Minemura, et al. “Reticle Inspection Using an Image Filter Method.” SPIE Proceedings, Aug. 2003. EBSCOhost, https://doi.org/10.1117/12.504203.

APA

Masahiko Minemura, Kazuhiko Takahashi, Satoshi Akutagawa, Tomoyuki Okada, & Mitsuo Sakurai. (2003). Reticle inspection using an image filter method. SPIE Proceedings. https://doi.org/10.1117/12.504203

Chicago

Masahiko Minemura, Kazuhiko Takahashi, Satoshi Akutagawa, Tomoyuki Okada, and Mitsuo Sakurai. 2003. “Reticle Inspection Using an Image Filter Method.” SPIE Proceedings, August. doi:10.1117/12.504203.