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Problems in Fabrication of Metal Pads for Capacitive MEMS Using Hands-on Open Facility

Authors :
Linxin Zhang
Takashiro Tsukamoto
Shuji Tanaka
Source :
IEEJ Transactions on Sensors and Micromachines. 142:220-223
Publication Year :
2022
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 2022.

Subjects

Subjects :
Mechanical Engineering
Electrical and Electronic Engineering

Details

ISSN :
13475525 and 13418939
Volume :
142
Database :
OpenAIRE
Journal :
IEEJ Transactions on Sensors and Micromachines
Accession number :
edsair.doi...........793c416e0f87738fa200fa44ce0bfefe

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