Technology of ultrathin films for ion-preventive feedback

Authors :: Guo-Jun Liu
Lichen Fu
Yaohua Lu
Delong Jiang
Ye Li
Jingquan Tian
Guifen Wang
Source :: Third International Conference on Thin Film Physics and Applications.
Publication Year :: 1998
Publisher :: SPIE, 1998.
Abstract: This paper introduces the materials and structure as well as the forming method of ultrathin films for ion-preventative feedback. The characteristics and measuring results are given. In the meantime, preliminary analysis and discussion are carried out.

Subjects :: Engineering
business.industry
Electrical engineering
business
Engineering physics
Ion
Preliminary analysis

ISSN :: 0277786X
Database :: OpenAIRE
Journal :: Third International Conference on Thin Film Physics and Applications
Accession number :: edsair.doi...........7a6ff3f2f0ee8c6a60c2604af803c002
Full Text :: https://doi.org/10.1117/12.300701