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Simulation of substrate temperature distribution during diamond film growth on zirconia with buffer layers by HFCVD method

Authors :
Feng Lu
Tongxiang Zheng
Xu Bai
Yuhou Wu
Zhengwei Fu
Tianen Hao
Source :
The International Journal of Advanced Manufacturing Technology.
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Subjects

Subjects :
Control and Systems Engineering
Mechanical Engineering
Industrial and Manufacturing Engineering
Software
Computer Science Applications

Details

ISSN :
14333015 and 02683768
Database :
OpenAIRE
Journal :
The International Journal of Advanced Manufacturing Technology
Accession number :
edsair.doi...........7bdbc2d1dee2e681e3fed2513095d663
Full Text :
https://doi.org/10.1007/s00170-022-10681-7
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