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Simultaneous measurement of lateral and vertical size of nanoparticles using transmission scanning electron microscopy (TSEM)

Authors :
Petr Cizmar
M U Bug
Egbert Buhr
Detlef Bergmann
C. G. Frase
Source :
Measurement Science and Technology. 28:034002
Publication Year :
2017
Publisher :
IOP Publishing, 2017.

Subjects

Subjects :
Materials science
Scanning electron microscope
business.industry
Applied Mathematics
Scanning confocal electron microscopy
Nanoparticle
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
010309 optics
Transmission (telecommunications)
0103 physical sciences
Optoelectronics
0210 nano-technology
business
Instrumentation
Engineering (miscellaneous)

Details

ISSN :
13616501 and 09570233
Volume :
28
Database :
OpenAIRE
Journal :
Measurement Science and Technology
Accession number :
edsair.doi...........7c27cd0a1a44dd09ac7ae7b8cb657ceb
Full Text :
https://doi.org/10.1088/1361-6501/28/3/034002
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