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Detection and discrimination of volatile organic compounds using a single multi-resonance mode piezotransduced silicon bulk acoustic wave resonator (PSBAR) as virtual sensor array
- Source :
- Sensors and Actuators B: Chemical. 254:1191-1199
- Publication Year :
- 2018
- Publisher :
- Elsevier BV, 2018.
-
Abstract
- This paper describes the detection of volatile organic compounds (VOCs) using an e-nose system based on a virtual sensor array (VSA). The VSA was realized by seven different resonant modes of a single piezotransduced silicon bulk acoustic wave resonator (PSBAR) which can greatly reduce the complexity of a conventional e-nose system. The PSBAR was designed and fabricated using standard CMOS compatible process. The resonant modes of the PSBAR and its capability of VOCs discrimination were theoretically explored through finite element analysis. The discrimination effect was enhanced by the non-uniform adsorption of gas molecules on the top, side and bottom regions of the resonator. Score plots and radar fingerprints obtained respectively from principal component analysis (PCA) and fitted coefficient of adsorption isotherms for each VOC compose sufficient information to successfully discriminate different VOCs. The proposed novel VSA shows great potential as a compact and promising e-nose system.
- Subjects :
- Materials science
Silicon
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
010402 general chemistry
01 natural sciences
law.invention
Resonator
Adsorption
Sensor array
law
Materials Chemistry
Electrical and Electronic Engineering
Radar
Instrumentation
business.industry
Metals and Alloys
Resonance
021001 nanoscience & nanotechnology
Condensed Matter Physics
Finite element method
0104 chemical sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
chemistry
Principal component analysis
Optoelectronics
0210 nano-technology
business
Subjects
Details
- ISSN :
- 09254005
- Volume :
- 254
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators B: Chemical
- Accession number :
- edsair.doi...........7c2e1afb2369ecd1099d4f725249a0f8