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Cleaning and Strip Requirement for Metal Gate Based CMOS Integration

Authors :
Tom Schram
Sebai Farid
Martine Cleas
Rita Vos
Masayuki Wada
Erika Rohr
Stefan Kubicek
Source :
ECS Meeting Abstracts. :2085-2085
Publication Year :
2009
Publisher :
The Electrochemical Society, 2009.

Abstract

not Available.

Details

ISSN :
21512043
Database :
OpenAIRE
Journal :
ECS Meeting Abstracts
Accession number :
edsair.doi...........7d19d438418ca924b92797f18121b838

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