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Electromigration lifetime and critical void volume

Authors :
Zhigang Suo
Jun He
J. A. Maiz
T. N. Marieb
Source :
Applied Physics Letters. 85:4639-4641
Publication Year :
2004
Publisher :
AIP Publishing, 2004.

Abstract

We study electromigration in copper lines encapsulated in an organosilicate glass. A line fails when a void near the upstream via grows to a critical volume. We calculate the void volume as a function of time. The statistical distribution of the critical volume (DCV) is taken to be independent of testing variables, such as line length and electric current density. By contrast, the distribution of the lifetime (DLT) strongly depends on these testing variables. We deduce the DCV from the experimentally measured DLT. Once deduced, the DCV can predict the DLT under untested conditions.

Details

ISSN :
10773118 and 00036951
Volume :
85
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........7d531322f297d7b663d23e49ef2e5273
Full Text :
https://doi.org/10.1063/1.1821631