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W-deposited contacts with carbon nanofiber using focused ion and electron beams
W-deposited contacts with carbon nanofiber using focused ion and electron beams
- Source :
- 2010 IEEE Nanotechnology Materials and Devices Conference.
- Publication Year :
- 2010
- Publisher :
- IEEE, 2010.
-
Abstract
- Carbon nanofiber (CNF) is promising as a next-generation on-chip interconnect material. Understanding the temperature dependence of CNF resistance is important in evaluating its potential for such interconnect applications. In a CNF test device, contacts formed by tungsten (W) deposition using focused ion beam (FIB) is effective in minimizing the effect of unwanted parasitics, thus yielding a more accurate determination of the temperature dependence. However, FIB deposition can potentially damage devices because of its high energy. We propose to use a gas-injection system for low-energy electron-beam deposition with fine precision in a variable-pressure scanning electron microscope. The results of W-deposited CNF devices obtained using electron beam (e-beam) are compared with their FIB counterparts.
Details
- Database :
- OpenAIRE
- Journal :
- 2010 IEEE Nanotechnology Materials and Devices Conference
- Accession number :
- edsair.doi...........7e387ca577af03ed4bff84acfef4806f
- Full Text :
- https://doi.org/10.1109/nmdc.2010.5652503