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W-deposited contacts with carbon nanofiber using focused ion and electron beams

W-deposited contacts with carbon nanofiber using focused ion and electron beams

Authors :
Cary Y. Yang
Tsutomu Saito
Shusaku Maeda
Patrick Whilhite
Hisashi Yabutani
Toshishige Yamada
Source :
2010 IEEE Nanotechnology Materials and Devices Conference.
Publication Year :
2010
Publisher :
IEEE, 2010.

Abstract

Carbon nanofiber (CNF) is promising as a next-generation on-chip interconnect material. Understanding the temperature dependence of CNF resistance is important in evaluating its potential for such interconnect applications. In a CNF test device, contacts formed by tungsten (W) deposition using focused ion beam (FIB) is effective in minimizing the effect of unwanted parasitics, thus yielding a more accurate determination of the temperature dependence. However, FIB deposition can potentially damage devices because of its high energy. We propose to use a gas-injection system for low-energy electron-beam deposition with fine precision in a variable-pressure scanning electron microscope. The results of W-deposited CNF devices obtained using electron beam (e-beam) are compared with their FIB counterparts.

Details

Database :
OpenAIRE
Journal :
2010 IEEE Nanotechnology Materials and Devices Conference
Accession number :
edsair.doi...........7e387ca577af03ed4bff84acfef4806f
Full Text :
https://doi.org/10.1109/nmdc.2010.5652503