A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope

Authors :: Ichiko Misumi
Kentaro Sugawara
Akiko Hirai
Ryosuke Kizu
Satoshi Gonda
Source :: Measurement Science and Technology. 31:094005
Publication Year :: 2020
Publisher :: IOP Publishing, 2020.

Subjects :: Optics
Materials science
business.industry
Atomic force microscopy
Standard plate
Applied Mathematics
Surface roughness
business
Instrumentation
Engineering (miscellaneous)
Metrology

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