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Electrical Characteristics of High Mobility Si/Si 0.5 Ge 0.5 /SOI Quantum-Well p-MOSFETs with a Gate Length of 100 nm and an Equivalent Oxide Thickness of 1.1 nm
- Source :
- Chinese Physics Letters. 30:108502
- Publication Year :
- 2013
- Publisher :
- IOP Publishing, 2013.
-
Abstract
- Short-channel high-mobility Si/Si0.5Ge0.5/silicon-on-insulator (SOI) quantum-well p-type metal-oxide-semiconductor field effect transistors (p-MOSFETs) were fabricated and electrically characterized. The transistors show good transfer and output characteristics with Ion/Ioff ratio up to 105 and sub-threshold slope down to 100mV/dec. HfO2/TiN gate stack is employed and the equivalent oxide thickness of 1.1 nm is achieved. The effective hole mobility of the transistors reaches 200cm2/V?s, which is 2.12 times the Si universal hole mobility.
Details
- ISSN :
- 17413540 and 0256307X
- Volume :
- 30
- Database :
- OpenAIRE
- Journal :
- Chinese Physics Letters
- Accession number :
- edsair.doi...........7e936c5906338c5e0d8e13cb8de6a417