Back to Search Start Over

Study on nanometer cutting mechanism of single crystal silicon at different temperatures

Authors :
Guigen Ye
Peng Zhang
Jiansheng Zhang
Yi Zhang
Xiaoguang Huang
Source :
Journal of Manufacturing Processes. 93:275-286
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Details

ISSN :
15266125
Volume :
93
Database :
OpenAIRE
Journal :
Journal of Manufacturing Processes
Accession number :
edsair.doi...........7eadaac776dcda88dee3c5e00e76106a
Full Text :
https://doi.org/10.1016/j.jmapro.2023.03.026