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Study on nanometer cutting mechanism of single crystal silicon at different temperatures
- Source :
- Journal of Manufacturing Processes. 93:275-286
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- ISSN :
- 15266125
- Volume :
- 93
- Database :
- OpenAIRE
- Journal :
- Journal of Manufacturing Processes
- Accession number :
- edsair.doi...........7eadaac776dcda88dee3c5e00e76106a
- Full Text :
- https://doi.org/10.1016/j.jmapro.2023.03.026