P‐3: LTPS Device and Panel Fabrication Using Excimer Laser Dehydrogenation and Crystallization

Subjects

Subjects :

Materials science
Fabrication
Excimer laser
business.industry
law
medicine.medical_treatment
medicine
Optoelectronics
Dehydrogenation
Crystallization
business
law.invention

Details

ISSN :

21680159 and 0097966X

Volume :

52

Database :

OpenAIRE

Journal :

SID Symposium Digest of Technical Papers

Accession number :

edsair.doi...........7eda7e2669541210c41e472959857c10

Full Text :

https://doi.org/10.1002/sdtp.14876