Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry

MLA

Donggeon Kwak, et al. “Evaluation of Size Distribution Measurement Methods for Sub-100 Nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry.” ECS Journal of Solid State Science and Technology, vol. 8, Jan. 2019, pp. P3195–200. EBSCOhost, https://doi.org/10.1149/2.0261905jss.

APA

Donggeon Kwak, Juhwan Kim, Taesung Kim, Seung-Ki Chae, Cheolmin Shin, Jinhak Choi, & Jichul Yang. (2019). Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry. ECS Journal of Solid State Science and Technology, 8, P3195–P3200. https://doi.org/10.1149/2.0261905jss

Chicago

Donggeon Kwak, Juhwan Kim, Taesung Kim, Seung-Ki Chae, Cheolmin Shin, Jinhak Choi, and Jichul Yang. 2019. “Evaluation of Size Distribution Measurement Methods for Sub-100 Nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry.” ECS Journal of Solid State Science and Technology 8 (January): P3195–3200. doi:10.1149/2.0261905jss.