Correction to Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero Oxidation State Precursor

Authors :: Dustin Z. Austin
Sallie Hose
Melanie A. Jenkins
John F. Conley
David J. Price
Derryl Allman
Charles L. Dezelah
Source :: Chemistry of Materials. 30:8983-8984
Publication Year :: 2018
Publisher :: American Chemical Society (ACS), 2018.

Subjects :: Atomic layer deposition
Materials science
chemistry
Oxidation state
General Chemical Engineering
Inorganic chemistry
Materials Chemistry
Zero (complex analysis)
chemistry.chemical_element
General Chemistry
Ruthenium oxide
Ruthenium

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