Design and Fabrication of PTFE Substrate Integrated Waveguide Coupler by SR Direct Etching

Authors :: Yuichi Utsumi
Akinobu Yamaguchi
Mitsuyoshi Kishihara
Masaya Takeuchi
Isao Ohta
Source :: IEICE Transactions on Electronics. :446-454
Publication Year :: 2021
Publisher :: Institute of Electronics, Information and Communications Engineers (IEICE), 2021.

Subjects :: Fabrication
Materials science
business.industry
Millimeter wave circuits
Etching (microfabrication)
Optoelectronics
X-ray lithography
Substrate (electronics)
Electrical and Electronic Engineering
business
Microstructure
Waveguide (optics)
Electronic, Optical and Magnetic Materials

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