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Cubic boron nitride films formed by DC plasma CVD

Authors :
Wanlu Wang
J. Y. Gao
Kejun Liao
Source :
Physica Status Solidi (a). 139:K25-K28
Publication Year :
1993
Publisher :
Wiley, 1993.

Subjects

Subjects :
chemistry.chemical_compound
chemistry
Boron nitride
Analytical chemistry
Mineralogy
Infrared spectroscopy
Crystal growth
Plasma
Nitride
Thin film
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :
1521396X and 00318965
Volume :
139
Database :
OpenAIRE
Journal :
Physica Status Solidi (a)
Accession number :
edsair.doi...........7f5a2dd9ffe596e53eb65b396a5acfcb
Full Text :
https://doi.org/10.1002/pssa.2211390131
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