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Fabrication of high-resolution conductive lines by combining inkjet printing with soft lithography
- Source :
- Microelectronic Engineering. 110:219-223
- Publication Year :
- 2013
- Publisher :
- Elsevier BV, 2013.
-
Abstract
- In this study, an effective method to fabricate well-defined conductive lines with high resolution has been proposed by combining inkjet printing with soft lithography. Soft lithography techniques such as nano-imprint lithography for negative SU-8 patterns and micro-contact printing for hydrophobic fluorocarbon layer were used to create surface wettability contrasts so that the spreading of droplets was confined on a hydrophilic region surrounded by hydrophobic regions. Surface wettability contrasts were evaluated by water contact angle measurements, and the maximum contact angle difference between hydrophobic and hydrophilic surfaces was 104^o. With the help of such surface wettability contrasts and lift-off process for removing small amount of ink stains, well-defined inkjet-printed lines as narrow as [email protected] can be successfully generated. The sintered Ag lines also show good electrical resistivity of [email protected]@W.cm, 4.7 times as large as bulk Ag's resistivity. This combined approach can be used to fabricate high-quality, high-resolution electrodes in printed electronics applications.
- Subjects :
- Fabrication
Materials science
Nanotechnology
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Soft lithography
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Contact angle
Printed electronics
Microcontact printing
Wetting
Electrical and Electronic Engineering
Layer (electronics)
Lithography
Subjects
Details
- ISSN :
- 01679317
- Volume :
- 110
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi...........7fb886655b4c7da1b9a16a8721a78287
- Full Text :
- https://doi.org/10.1016/j.mee.2013.04.004