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Advanced Metallization for ULSI Applications

Authors :
Kazuyoshi Ueno
Young Bae Park
Hoo Jeong Lee
Osamu Nakatsuka
Shinji Yokogawa
Source :
Japanese Journal of Applied Physics. 55:06J001
Publication Year :
2016
Publisher :
IOP Publishing, 2016.

Subjects

Subjects :
Materials science
General Engineering
General Physics and Astronomy

Details

ISSN :
13474065 and 00214922
Volume :
55
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........7ff77e3774c6ae962bf85aedba952255
Full Text :
https://doi.org/10.7567/jjap.55.06j001
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