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Low-thermal-budget (300 °C) ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors realized using high-pressure annealing
- Source :
- Applied Physics Letters. 119:242901
- Publication Year :
- 2021
- Publisher :
- AIP Publishing, 2021.
- Subjects :
- Physics and Astronomy (miscellaneous)
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 119
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi...........804b7a2e4904f945ea2c7d84590ea79f
- Full Text :
- https://doi.org/10.1063/5.0075466