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Extension of longitudinal measuring range of a confocal surface profilometer using a gradient-intensity probe beam

Authors :
Po Jui Chen
An Chi Wei
Jyh Rou Sze
Source :
Japanese Journal of Applied Physics. 58:SJJE01
Publication Year :
2019
Publisher :
IOP Publishing, 2019.

Subjects

Subjects :
Surface (mathematics)
Range (particle radiation)
Materials science
Optics
Physics and Astronomy (miscellaneous)
business.industry
Confocal
General Engineering
General Physics and Astronomy
Profilometer
business
Beam (structure)
Intensity (physics)

Details

ISSN :
13474065 and 00214922
Volume :
58
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........806690b733cca56a3f46fd7df599e93f
Full Text :
https://doi.org/10.7567/1347-4065/ab1e3b
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