Investigation of the SAW Property Change for Surface Processed LiNbO3 Crystal

We calculate the influence of the surface processing on the SAW velocity based on the perturbation theory for LiNbO3 crystal with surface diffused by Ti. The calculation results show that: the SAW velocity change depends on the depth of Ti‐diffused layer. The velocity of SAW propagating along the Ti‐diffusion layer increase with the depth of Ti‐diffused layer increasing. The detail results, discussions, and comparison between the experimental and the calculation results are presented in this article.