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Multicomponent Hf-Nb-Ti-V-Zr nitride coatings by reactive magnetron sputter deposition
- Source :
- Surface and Coatings Technology. 349:529-539
- Publication Year :
- 2018
- Publisher :
- Elsevier BV, 2018.
-
Abstract
- Multicomponent nitride coatings of the Hf-Nb-Ti-V-Zr system with different Hf content (0-18 at.%) were deposited using reactive dc magnetron sputtering. Coatings with lower Hf content (0-7 at.%) we ...
- Subjects :
- 010302 applied physics
Solid-state chemistry
Reactive magnetron
Materials science
02 engineering and technology
Surfaces and Interfaces
General Chemistry
Nitride
Sputter deposition
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
Chemical engineering
0103 physical sciences
Materials Chemistry
0210 nano-technology
Subjects
Details
- ISSN :
- 02578972
- Volume :
- 349
- Database :
- OpenAIRE
- Journal :
- Surface and Coatings Technology
- Accession number :
- edsair.doi...........81a4d14528504bb11da65333556c77b0
- Full Text :
- https://doi.org/10.1016/j.surfcoat.2018.06.030