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Polyacrylic Acid as a Lubricant and a Complement to 1,2,4-Triazole for Copper Chemical Mechanical Polishing

Authors :
Liang Jiang
Qiuyu Li
Yushan Chen
Yuan Wu
Mao Sun
Linmao Qian
Source :
Tribology Letters. 71
Publication Year :
2023
Publisher :
Springer Science and Business Media LLC, 2023.

Subjects

Subjects :
Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

Details

ISSN :
15732711 and 10238883
Volume :
71
Database :
OpenAIRE
Journal :
Tribology Letters
Accession number :
edsair.doi...........81d75ca1777baa76777b05fe4263c05b

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