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Polyacrylic Acid as a Lubricant and a Complement to 1,2,4-Triazole for Copper Chemical Mechanical Polishing
- Source :
- Tribology Letters. 71
- Publication Year :
- 2023
- Publisher :
- Springer Science and Business Media LLC, 2023.
Details
- ISSN :
- 15732711 and 10238883
- Volume :
- 71
- Database :
- OpenAIRE
- Journal :
- Tribology Letters
- Accession number :
- edsair.doi...........81d75ca1777baa76777b05fe4263c05b