Effect of oxygen on the crystallinity and defect state of AlxGa1−xN epilayers

Subjects

Subjects :

Biomaterials
Metals and Alloys
Ceramics and Composites
Surfaces, Coatings and Films

Details

ISSN :

22387854

Volume :

22

Database :

OpenAIRE

Journal :

Journal of Materials Research and Technology

Accession number :

edsair.doi...........8401b7a77705123f12230aa71bc5e2ed

Full Text :

https://doi.org/10.1016/j.jmrt.2022.11.166