CMOS-compatible direct laser writing of sulfur-ultrahyperdoped silicon: Breakthrough pre-requisite for UV-THz optoelectronic nano/microintegration

Authors :: Sergey Kudryashov
Alena Nastulyavichus
George Krasin
Kamil Khamidullin
Kirill Boldyrev
Demid Kirilenko
Alexander Yachmenev
Dmitry Ponomarev
Gennady Komandin
Sergey Lebedev
Dmitry Prikhod'ko
Michael Kovalev
Source :: Optics & Laser Technology. 158:108873
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

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