AFM lithography combined with optical lithography

MLA

T. Hashizume, et al. “AFM Lithography Combined with Optical Lithography.” Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387), Nov. 2002. EBSCOhost, https://doi.org/10.1109/imnc.2000.872701.

APA

T. Hashizume, Masayoshi Ishibashi, & S. Heike. (2002). AFM lithography combined with optical lithography. Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387). https://doi.org/10.1109/imnc.2000.872701

Chicago

T. Hashizume, Masayoshi Ishibashi, and S. Heike. 2002. “AFM Lithography Combined with Optical Lithography.” Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387), November. doi:10.1109/imnc.2000.872701.