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Theoretical and experimental analysis of surface topography and surface roughness evolution in fixed abrasive double-sided planetary lapping of YAG wafers

Authors :
Lei Yang
Xiaoguang Guo
Renke Kang
Xianglong Zhu
Yufan Jia
Source :
The International Journal of Advanced Manufacturing Technology.
Publication Year :
2023
Publisher :
Springer Science and Business Media LLC, 2023.

Subjects

Subjects :
Control and Systems Engineering
Mechanical Engineering
Industrial and Manufacturing Engineering
Software
Computer Science Applications

Details

ISSN :
14333015 and 02683768
Database :
OpenAIRE
Journal :
The International Journal of Advanced Manufacturing Technology
Accession number :
edsair.doi...........84c4bb38c5cd094fe6b388e0e6e0374f

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