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Structure-sensitive principle in silicon nanowire growth

Authors :
Yuehua Huang
Fengji Li
Shu Wang
Sam Zhang
Source :
Thin Solid Films. 697:137814
Publication Year :
2020
Publisher :
Elsevier BV, 2020.

Abstract

Silicon (Si) nanowires with twining or stacking faults are challenging their applications in microelectronic devices. It is of great value to explore the assembling principle of the crystal structure of Si nanowires. In this work, Si nanowires are grown by thermal annealing of nickel (Ni) coated Si wafers underneath an amorphous carbon layer. A systematically investigation is performed on the crystal structure of Si nanowires and the connected Ni catalyst particles using field emission scanning electron microscopy, high resolution transmission electron microscopy and selected area electron diffraction pattern. The results reveal that the defect-free Si nanowire has a highly crystalline Si core surrounded by the amorphous Si-oxide shell. Twinning and stacking faults are discovered locating near the Ni catalyst particles. The origin for the structural defects is explained by a structure-sensitive principle.

Details

ISSN :
00406090
Volume :
697
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........866ab82a813cded66b8598eed38b1cd2
Full Text :
https://doi.org/10.1016/j.tsf.2020.137814