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Sputtering pressure effects on the structural and mechanical properties of TiVCr alloy coatings
- Source :
- Applied Surface Science. 257:3969-3973
- Publication Year :
- 2011
- Publisher :
- Elsevier BV, 2011.
-
Abstract
- In this study, TiVCr alloy coatings were deposited on Si substrates by magnetron sputtering system at different working pressures (0.33–1 Pa). The TiVCr coatings have a composite structure with amorphous and body-centered cubic (bcc) crystal phases comprised of bundles of fine fibrous structures and V-shaped columnar structures, respectively. Compared with the amorphous zone, the crystalline zone has a denser and more compact structure. The coating microstructure became more porous as working pressure increased. Consequently, the crystal zones of the deposited coatings at 0.33 Pa obtained higher hardness (11.6 GPa) while the deposited coatings at 1 Pa achieved lower hardness (4.5 GPa).
- Subjects :
- Materials science
Metallurgy
Alloy
General Physics and Astronomy
Surfaces and Interfaces
General Chemistry
Chemical vapor deposition
Sputter deposition
engineering.material
Condensed Matter Physics
Microstructure
Surfaces, Coatings and Films
Amorphous solid
Crystal
Sputtering
engineering
Thin film
Subjects
Details
- ISSN :
- 01694332
- Volume :
- 257
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........8937155e9e5c90e04249669e835f76e5