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Texture formation in chemical vapor deposition of Ti(C,N)

Authors :
Erik Lindahl
L. von Fieandt
Mats Boman
T. Larsson
Source :
Journal of Crystal Growth. 508:90-95
Publication Year :
2019
Publisher :
Elsevier BV, 2019.

Abstract

The growth mechanism of Ti(C,N) coatings produced by chemical vapor deposition was investigated as a function of the TiCl4/CH3CN molar ratio in excess of H-2. The depositions were carried out at a ...

Subjects

Subjects :
010302 applied physics
Materials science
02 engineering and technology
Chemical vapor deposition
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Inorganic Chemistry
Texture formation
Chemical engineering
Molar ratio
0103 physical sciences
Materials Chemistry
0210 nano-technology

Details

ISSN :
00220248
Volume :
508
Database :
OpenAIRE
Journal :
Journal of Crystal Growth
Accession number :
edsair.doi...........898c0f8a3033991d5edd48a4afad6f87
Full Text :
https://doi.org/10.1016/j.jcrysgro.2018.12.030
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