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A Mode-Localized Magnetometer with Resolution of $6.9\ \text{NT}/ \surd \text{Hz}$ Within the Range of 100 mT
- Source :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- This paper reports a mode-localized magnetometer with novel 3 degrees-of-freedom (DOF) weakly coupled resonators (WCRs) coupled by F-shaped coupling beams. In this coupling mechanism, the direct coupling between the two outer resonators can be effectively suppressed, which decreases the coupling coefficient and drastically increases the sensitivity. Utilizing these novel WCRs for Lorentz force sensing, a magnetometer is realized with the resolution of $6.9\ \text{nT}/\surd \text{Hz}$ in the range of 100 mT, which is an improvement of 234.78 times that of state-of-the-art mode-localized magnetometers ( $1.62\ \mu \mathrm{T}/\surd\text{Hz}$ ).
- Subjects :
- Materials science
Magnetometer
010401 analytical chemistry
Resolution (electron density)
02 engineering and technology
021001 nanoscience & nanotechnology
Coupling (probability)
01 natural sciences
0104 chemical sciences
law.invention
symbols.namesake
Resonator
law
symbols
Direct coupling
Sensitivity (control systems)
Atomic physics
0210 nano-technology
Lorentz force
Coupling coefficient of resonators
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........89a5d6ba85ddbf6deacf2cbe5517a2c7
- Full Text :
- https://doi.org/10.1109/mems46641.2020.9056377