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Dynamic metrology and data processing for precision freeform optics fabrication and testing

Authors :
Chang Jin Oh
Isaac Trumper
Wenchuan Zhao
Dae Wook Kim
Lei Huang
Logan R. Graves
Heejoo Choi
Maham Aftab
Source :
SPIE Proceedings.
Publication Year :
2017
Publisher :
SPIE, 2017.

Abstract

Dynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction technique. The adaptive null testing method, utilizing a deformable mirror, adopts a stochastic parallel gradient descent search algorithm in order to dynamically create a null testing condition for unknown freeform optics. The single-shot deflectometry system implemented on an iPhone uses a multiplexed display pattern to enable dynamic measurements of time-varying optical components or optics in vibration. Experimental data, measurement accuracy / precision, and data processing algorithms are discussed.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........8a01f2747ae5abb7aca4bed33bff018a
Full Text :
https://doi.org/10.1117/12.2272353