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Post-annealing effect on the optical property of indium tin oxide sputtered films
- Source :
- Current Applied Physics. 16:1576-1580
- Publication Year :
- 2016
- Publisher :
- Elsevier BV, 2016.
-
Abstract
- By using the spectroscopic ellipsometric technique, we investigated the excimer laser annealing (ELA) effect on the electronic properties of indium tin oxides (ITO) films fabricated by the DC-sputtering method, which is the one of the most commonly known methods for the commercial ITO films. We found that while the ELA process was helpful for enhancing the electronic property of the sputtered films, the degree of the enhancement was not so sizable as the case of the sol-gel films. This result appeared to originate from the difference in the physical properties of the sol-gel and sputtered amorphous films. We also examined the thermal annealing (TA) effect on the sputtered amorphous films in various ambient conditions, and compared their physical properties with those of the TA sol-gel films.
- Subjects :
- 010302 applied physics
Materials science
business.industry
Metallurgy
Optical property
General Physics and Astronomy
chemistry.chemical_element
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Amorphous solid
Indium tin oxide
Post annealing
chemistry
Sputtering
0103 physical sciences
Optoelectronics
General Materials Science
0210 nano-technology
Tin
business
Excimer laser annealing
Indium
Subjects
Details
- ISSN :
- 15671739
- Volume :
- 16
- Database :
- OpenAIRE
- Journal :
- Current Applied Physics
- Accession number :
- edsair.doi...........8a0b7a83f763cfc4c6ffc172c9351c96