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Growth of twin-free cubic In2O3(111) thick layers on c-plane sapphire substrates by halide vapor phase epitaxy
- Source :
- Japanese Journal of Applied Physics. 60:125506
- Publication Year :
- 2021
- Publisher :
- IOP Publishing, 2021.
-
Abstract
- The growth of twin-free single-crystal cubic-indium oxide (c-In2O3) layers was investigated by halide vapor phase epitaxy on c-plane sapphire substrates with various off-axis angles. The growth rate of the c-In2O3 layer increased and twin formation was suppressed as the off-axis angle of the substrate was increased. A single-crystal c-In2O3(111) layer grown on a sapphire substrate with a 5° off-axis angle showed a room temperature carrier density and mobility of 1.4 × 1016 cm−3 and 232 cm2 V−1 s−1, respectively. Temperature-dependent Hall measurements of the layer revealed that the mobility is dominated by optical phonon scattering.
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 60
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........8b34552bcd96dcadbe13f15b6137bcd7