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Accurate screening of defective oxide on SiC using consecutive multiple threshold-voltage measurements

Authors :
H. Miki
M. Sagawa
Y. Mori
T. Murata
K. Kinoshita
K. Asaka
T. Oda
Source :
2022 IEEE International Reliability Physics Symposium (IRPS).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE International Reliability Physics Symposium (IRPS)
Accession number :
edsair.doi...........8bb0f01c162a7792e023caf3be07d887

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