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Time Evolution of the Dissociation Fraction in rf CO2 Plasmas: Impact and Nature of Back-Reaction Mechanisms
- Source :
- The Journal of Physical Chemistry C. 124:17459-17475
- Publication Year :
- 2020
- Publisher :
- American Chemical Society (ACS), 2020.
-
Abstract
- The time evolution of the dissociation fraction in a pulsed radio frequency (rf) CO2 discharge is studied by infrared absorption. A large parametric study performed in a closed reactor brings valua...
- Subjects :
- Materials science
Time evolution
Infrared spectroscopy
Astrophysics::Cosmology and Extragalactic Astrophysics
02 engineering and technology
Plasma
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Dissociation (chemistry)
0104 chemical sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
General Energy
Physics::Plasma Physics
Back-reaction
Astrophysics::Earth and Planetary Astrophysics
Radio frequency
Physics::Chemical Physics
Physical and Theoretical Chemistry
Atomic physics
0210 nano-technology
Subjects
Details
- ISSN :
- 19327455 and 19327447
- Volume :
- 124
- Database :
- OpenAIRE
- Journal :
- The Journal of Physical Chemistry C
- Accession number :
- edsair.doi...........8bb621fe12b45311247d1b1c89ee52c9
- Full Text :
- https://doi.org/10.1021/acs.jpcc.0c03354