High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

MLA

Wen-Chien Chen, et al. “High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning.” Journal of Microelectromechanical Systems, vol. 21, June 2012, pp. 688–701. EBSCOhost, https://doi.org/10.1109/jmems.2012.2189360.

APA

Wen-Chien Chen, Weileun Fang, & Sheng-Shian Li. (2012). High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning. Journal of Microelectromechanical Systems, 21, 688–701. https://doi.org/10.1109/jmems.2012.2189360

Chicago

Wen-Chien Chen, Weileun Fang, and Sheng-Shian Li. 2012. “High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning.” Journal of Microelectromechanical Systems 21 (June): 688–701. doi:10.1109/jmems.2012.2189360.