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360° phase-measuring profilometry of 3-D diffuse objects using random phase shift algorithm

Authors :
Ching-Piao Hu
Source :
SPIE Proceedings.
Publication Year :
1990
Publisher :
SPIE, 1990.

Abstract

A random phase shift atgorithm based on the principLe of phase-measuring profiLometry with a projected sinusoidaL grating to 360 measurement-of the surface topography of 3-D diffuse objects is presented. In contrast to phase shifting interferometry this method eLiminates the needs of vibration isoLation thus an on-Line or in-process amasurement could be executed. 1.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........8d285443d79fe1276dba7777995fd3e1
Full Text :
https://doi.org/10.1117/12.34747