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Mobility Enhancement Induced by Oxygen Gettering of TiAl for Metal Gated NMOSFETs

Authors :
Zhao-Yang Li
Xue-Jiao Wang
Han-Lun Cai
Zhao-Zhang Yan
Tao Huang
Yu-Long Jiang
Jing Wan
Source :
IEEE Transactions on Electron Devices. 70:871-876
Publication Year :
2023
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2023.

Details

ISSN :
15579646 and 00189383
Volume :
70
Database :
OpenAIRE
Journal :
IEEE Transactions on Electron Devices
Accession number :
edsair.doi...........8d70a5f3d0305471838103c00e0599c1
Full Text :
https://doi.org/10.1109/ted.2023.3235315