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Growth of Thin Films by Sputter Beam Method

Authors :
Satoshi Okamoto
Osamu Kitakami
Yutaka Shimada
Source :
Materia Japan. 36:1016-1020
Publication Year :
1997
Publisher :
Japan Institute of Metals, 1997.

Subjects

Subjects :
Materials science
business.industry
Sputtering
Optoelectronics
Thin film
business
Beam (structure)

Details

ISSN :
18845843 and 13402625
Volume :
36
Database :
OpenAIRE
Journal :
Materia Japan
Accession number :
edsair.doi...........8e447471e4d797de94151fda58ce0a1d
Full Text :
https://doi.org/10.2320/materia.36.1016
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