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Adsorption of SiH4 on copper () and () surfaces

Authors :
A.W. Robinson
Anton P. J. Stampfl
G.L. Nyberg
Michelle J. S. Spencer
Source :
Surface Science. 505:308-324
Publication Year :
2002
Publisher :
Elsevier BV, 2002.

Abstract

The adsorption of silane on Cu(1 1 1) and Cu(1 1 0) is examined using vibrational electron energy loss spectroscopy, angle-resolved ultraviolet photoelectron spectroscopy and X-ray photoelectron spectroscopy. At room temperature, SiH adsorbs on Cu(1 1 1), whereas complete dissociation occurs on Cu(1 1 0) to leave adsorbed silicon. Below room temperature, an SiHx (x=2 or 3) species exists on both surfaces. A surface-molecule bonding model is constructed to describe the adsorbate–substrate interactions and suggests that both Si and SiH adsorb in a substitutional or hollow site on the (1 1 1) surface and Si adsorbs in one of the same two sites on the (1 1 0) surface.

Details

ISSN :
00396028
Volume :
505
Database :
OpenAIRE
Journal :
Surface Science
Accession number :
edsair.doi...........911ce6edaef95679f9fa1206396a2fb6
Full Text :
https://doi.org/10.1016/s0039-6028(02)01378-x