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Investigation of Sputtering Damage in SrRuO3Films Prepared by Sputtering with Raman and X-ray Photoemission Spectroscopies
- Source :
- Japanese Journal of Applied Physics. 51:09LA19
- Publication Year :
- 2012
- Publisher :
- IOP Publishing, 2012.
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 51
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........930906f035546c7c5b5d02a72d354316
- Full Text :
- https://doi.org/10.7567/jjap.51.09la19