Microwave acoustic properties of diamond single crystal as a substrate for High-overtone Bulk Acoustic Resonator

Authors :: Georgy Gordeev
Boris P. Sorokin
V. S. Bormashov
Vitaly V. Aksenenkov
A. P. Volkov
Arsenii V. Telichko
M.S. Kuznetsov
G. M. Kvashnin
Source :: 2013 IEEE International Ultrasonics Symposium (IUS).
Publication Year :: 2013
Publisher :: IEEE, 2013.
Abstract: The piezoelectric layered structure Me1/AlN/Me2/single crystalline diamond was developed. Acoustic properties of number the layered structures have been studied on microwave frequency band. The frequency dependence of quality factor was estimated as Q·f ≈ 5.6·1013. The pressure and temperature influence on the resonant frequency have been studied. First resonant overtones with Q ~ 2500 were observed on super high frequencies ~ 19.5 GHz.

Subjects :: Materials science
business.industry
Material properties of diamond
Acoustics
Overtone
Diamond
engineering.material
Piezoelectricity
Resonator
Acoustic emission
engineering
Optoelectronics
business
Single crystal
Microwave

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