Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh

We present the fabrication of submicron polyimide film sandwiched by Al film. The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.