Self-consistent simulation of electron cyclotron resonance plasma discharge

Microwave fields in an extended electron cyclotron resonance (ECR) plasma reactor were analyzed in the resonant cavity from Maxwell’s equations, and a formalism of microwave absorption was investigated at the resonance zone with plasma kinetic theory and simulated using a two-dimension computer hybrid-code. The results indicated that there are three typical power deposition profiles over the entire parameter range: (1) the parabolic shape: peaking on axis and decreasing slowly along the radius, (2) the trumpet shape: peaking on axis and decreasing quickly along the radius, and (3) the camel shape, i.e., a hollow distribution. The spatial distributions of plasma parameters (plasma density, electron temperature, ionization rate, etc.) would be significantly influenced by the microwave power absorption profile.