High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Subjects

Subjects :

Biomedical Engineering
General Materials Science
Bioengineering
Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics

Details

ISSN :

17483395 and 17483387

Volume :

18

Database :

OpenAIRE

Journal :

Nature Nanotechnology

Accession number :

edsair.doi...........95bf0ef389398ea380dac81854da57bd

Full Text :

https://doi.org/10.1038/s41565-023-01340-3