Bright red, orange-yellow and white switching photoluminescence from silicon oxynitride films with fast decay dynamics

Strong tunable photoluminescence (PL) from silicon oxynitride materials have been demonstrated by modulating the oxygen content. The increase of oxygen content in the films from 8% to 61% results in red, orange-yellow and white switching PL. The change in PL characteristics of these films is ascribed to the variation of defect luminescent centers as well as the evolution of dominant phase structures changing from silicon nitride to silicon oxynitride and silicon oxide. The intense PL intensity is suggested from the nanoseconds recombination lifetime as well as the alleviation of internal stress in silicon oxynitride.